HEATER STATE SENSING SYSTEMS AND METHODS

The present invention relates to a heater state sensing system and method capable of sensing a state of a heater, such as a disconnection of a heating wire of a DC heating type heater, in real time, and may comprise: a sensing device for sensing an electrical state of a heater provided on a substrate holder on which a substrate is mounted or of a power supply line for supplying power to the heater; and a sensing control unit that receives the sensing signal from the sensing device, compares the sensing signal with a reference value, and generates a notification signal if it is determined that the state is abnormal. 本发明涉及能够实时感测如直流加热式加热器的加热线的断线等加热器的状态的加热器状态感测系统及方法，可以包括：感测装置，感测安装基板的基板支架上设置的加热器或向所述加热器供电的供电线路的电气状态；和感测控制部，从所述感测装置接收感测信号并将其与基准值进行比较，若判断为异常状态，则生成通知信号。