Wafer and wafer manufacturing method

The invention relates to the technical field of semiconductors, and discloses a wafer, which comprises a wafer body, and the cutting groove is formed in the wafer body along the cutting channel of the wafer body. The cutting grooves are formed in the cutting channels of the wafer body. Due to the fa...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LI KAILIANG, ZHENG PUGUANG, ZHANG JUANRONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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