High-speed optical phase measurement system, measurement method and application thereof
The invention belongs to the related technical field of phase measurement, and discloses a high-speed optical phase measurement system and method and application thereof.The system comprises an illumination module, a microscopic module, an interference module, a camera module, a high-precision posit...
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| creator | ZHU JINLONG LI ZEDI |
| description | The invention belongs to the related technical field of phase measurement, and discloses a high-speed optical phase measurement system and method and application thereof.The system comprises an illumination module, a microscopic module, an interference module, a camera module, a high-precision positioning table and a control and data processing module, and the illumination module comprises a collimation light source; the microscopic module comprises a beam splitter; the interference module comprises an objective lens and a reference lens, and a preset angle is formed between the reference lens and the plane perpendicular to the optical axis; the high-precision positioning table is used for bearing a sample; the distance between the sample and the objective lens is equal to the distance between the objective lens and the reference lens, and the reference lens and the sample are conjugated with the plane of the camera module; emergent light of the collimation light source enters the objective lens and the refer |
| format | Patent |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
| title | High-speed optical phase measurement system, measurement method and application thereof |
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