Leveling device and photoetching machine

The invention relates to the technical field of photoetching machines, and discloses a leveling device and a photoetching machine. The leveling device comprises a suction cup assembly, a mask table, a vertical movement table and at least three leveling assemblies. The adjusting balls of the at least...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIE YIREN, QI NENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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