Lead glass through hole micro-channel plate and manufacturing method and application thereof
The invention relates to a lead glass through hole micro-channel plate and a manufacturing method and application thereof, and the method comprises the following steps: 1) mixing, grinding, stamping, forming, cutting, grinding and polishing lead glass raw materials to obtain a lead glass sheet mater...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a lead glass through hole micro-channel plate and a manufacturing method and application thereof, and the method comprises the following steps: 1) mixing, grinding, stamping, forming, cutting, grinding and polishing lead glass raw materials to obtain a lead glass sheet material; 2) performing laser-induced local modification and chemical selective corrosion on the lead glass sheet material to obtain a substrate material with a lead glass through hole array structure; and (3) manufacturing a resistive secondary electron emission layer from the substrate material through hydrogen reduction treatment or atomic layer deposition to obtain the lead glass through hole micro-channel plate. The aperture and the pitch of the channels are adjustable, the multiplication imaging discrimination rate is high, the electronic gain is adjustable, the detection quantum efficiency is high, the dark current noise is low, the dynamic range is large, and the device can be widely applied to the fields of low |
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