Diffusion process for reducing cooling gettering time and improving yield

The invention discloses a diffusion process capable of reducing cooling gettering time and increasing yield, which comprises seven steps of low-temperature boat entering, high-temperature stabilization, low-temperature oxidation, gradient low-temperature deposition and oxidation, high-temperature propulsion, cooling gettering and low-temperature boat exiting, and the cooling gettering scheme is that 3000sccm of N2 is introduced, the temperature is controlled to be 780 DEG C, and the time is 520 seconds. The rapid heating step and the low-temperature oxidation step are removed from the traditional solar cell P diffusion gettering process, the temperature of the cooling gettering step is reduced to 780 DEG C from 800 DEG C, the time is reduced to 520 s from 1000 s, the process belongs to a variable-temperature diffusion process, the good P diffusion effect can be guaranteed, the gettering effect can be guaranteed while the P diffusion gettering time is shortened, and the service life of the solar cell is prolon