Asymmetric gap cantilever beam array type MEMS heart sound sensor

The invention discloses an asymmetric gap cantilever beam array type MEMS heart sound sensor, and relates to the field of biomedical devices, a microstructure of the heart sound sensor comprises a plurality of gap cantilever beam structures, and the plurality of gap cantilever beam structures are ra...

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Bibliographische Detailangaben
Hauptverfasser:	LIU SHENG, PAN DAN, LYU TING, HOU DONGYANG, HIGASHIYOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIAGNOSIS DIFFUSION TREATMENT OF METALLIC MATERIAL HUMAN NECESSITIES HYGIENE IDENTIFICATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEDICAL OR VETERINARY SCIENCE METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION SURGERY
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