Asymmetric gap cantilever beam array type MEMS heart sound sensor

The invention discloses an asymmetric gap cantilever beam array type MEMS heart sound sensor, and relates to the field of biomedical devices, a microstructure of the heart sound sensor comprises a plurality of gap cantilever beam structures, and the plurality of gap cantilever beam structures are ra...

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Bibliographische Detailangaben
Hauptverfasser: LIU SHENG, PAN DAN, LYU TING, HOU DONGYANG, HIGASHIYOSHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an asymmetric gap cantilever beam array type MEMS heart sound sensor, and relates to the field of biomedical devices, a microstructure of the heart sound sensor comprises a plurality of gap cantilever beam structures, and the plurality of gap cantilever beam structures are radially arranged from an annular support body to the periphery; each gap cantilever beam structure comprises a mechanical layer cantilever beam, a piezoelectric layer cantilever beam and a mass block; the piezoelectric layer cantilever beams are connected with a conditioning circuit board of the heart sound sensor through wires, and signals output by the piezoelectric layer cantilever beams are connected in parallel. The piezoelectric layer cantilever beam is narrower than the mechanical layer cantilever beam and is located above the mechanical layer cantilever beam, a distance is reserved between the piezoelectric layer cantilever beam and the mechanical layer cantilever beam, and two ends of the two are respective