MEMS chip protection structure and MEMS device

The invention provides an MEMS chip protection structure and an MEMS device, relates to the technical field of MEMS chip reliability, and aims to solve the problem of insufficient reliability of an MEMS chip in an impact vibration environment. The MEMS chip protection structure comprises an active l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIA YANG, PENG TIANFANG, HAN YINGZHOU, QIAO YUYANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!