MEMS chip protection structure and MEMS device
The invention provides an MEMS chip protection structure and an MEMS device, relates to the technical field of MEMS chip reliability, and aims to solve the problem of insufficient reliability of an MEMS chip in an impact vibration environment. The MEMS chip protection structure comprises an active l...
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| creator | XIA YANG PENG TIANFANG HAN YINGZHOU QIAO YUYANG |
| description | The invention provides an MEMS chip protection structure and an MEMS device, relates to the technical field of MEMS chip reliability, and aims to solve the problem of insufficient reliability of an MEMS chip in an impact vibration environment. The MEMS chip protection structure comprises an active limiting mechanism, the active limiting mechanism is arranged on the outer side of the side wall of an MEMS chip, and the active limiting mechanism is configured to clamp the MEMS chip when powered on. According to the MEMS chip protection structure provided by the invention, the effective protection on the MEMS chip can be realized.
本发明提供了一种MEMS芯片保护结构和MEMS器件，涉及MEMS芯片可靠性技术领域，以解决对MEMS芯片在冲击振动环境下可靠性不足的问题。MEMS芯片保护结构包括主动限位机构，所述主动限位机构设置于MEMS芯片侧壁外侧，所述主动限位机构配置为在通电时夹持所述MEMS芯片。本发明提供的MEMS芯片保护结构可以实现对MEMS芯片的有效保护。 |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN117105164A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN117105164A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN117105164A3</originalsourceid><addsrcrecordid>eNrjZNDzdfUNVkjOyCxQKCjKL0lNLsnMz1MoLikqTS4pLUpVSMxLUQArSUkty0xO5WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8c5-hobmhgamhmYmjsbEqAEAnc0prA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MEMS chip protection structure and MEMS device</title><source>esp@cenet</source><creator>XIA YANG ; PENG TIANFANG ; HAN YINGZHOU ; QIAO YUYANG</creator><creatorcontrib>XIA YANG ; PENG TIANFANG ; HAN YINGZHOU ; QIAO YUYANG</creatorcontrib><description>The invention provides an MEMS chip protection structure and an MEMS device, relates to the technical field of MEMS chip reliability, and aims to solve the problem of insufficient reliability of an MEMS chip in an impact vibration environment. The MEMS chip protection structure comprises an active limiting mechanism, the active limiting mechanism is arranged on the outer side of the side wall of an MEMS chip, and the active limiting mechanism is configured to clamp the MEMS chip when powered on. According to the MEMS chip protection structure provided by the invention, the effective protection on the MEMS chip can be realized.
本发明提供了一种MEMS芯片保护结构和MEMS器件，涉及MEMS芯片可靠性技术领域，以解决对MEMS芯片在冲击振动环境下可靠性不足的问题。MEMS芯片保护结构包括主动限位机构，所述主动限位机构设置于MEMS芯片侧壁外侧，所述主动限位机构配置为在通电时夹持所述MEMS芯片。本发明提供的MEMS芯片保护结构可以实现对MEMS芯片的有效保护。</description><language>chi ; eng</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231124&DB=EPODOC&CC=CN&NR=117105164A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231124&DB=EPODOC&CC=CN&NR=117105164A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>XIA YANG</creatorcontrib><creatorcontrib>PENG TIANFANG</creatorcontrib><creatorcontrib>HAN YINGZHOU</creatorcontrib><creatorcontrib>QIAO YUYANG</creatorcontrib><title>MEMS chip protection structure and MEMS device</title><description>The invention provides an MEMS chip protection structure and an MEMS device, relates to the technical field of MEMS chip reliability, and aims to solve the problem of insufficient reliability of an MEMS chip in an impact vibration environment. The MEMS chip protection structure comprises an active limiting mechanism, the active limiting mechanism is arranged on the outer side of the side wall of an MEMS chip, and the active limiting mechanism is configured to clamp the MEMS chip when powered on. According to the MEMS chip protection structure provided by the invention, the effective protection on the MEMS chip can be realized.
本发明提供了一种MEMS芯片保护结构和MEMS器件，涉及MEMS芯片可靠性技术领域，以解决对MEMS芯片在冲击振动环境下可靠性不足的问题。MEMS芯片保护结构包括主动限位机构，所述主动限位机构设置于MEMS芯片侧壁外侧，所述主动限位机构配置为在通电时夹持所述MEMS芯片。本发明提供的MEMS芯片保护结构可以实现对MEMS芯片的有效保护。</description><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNDzdfUNVkjOyCxQKCjKL0lNLsnMz1MoLikqTS4pLUpVSMxLUQArSUkty0xO5WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8c5-hobmhgamhmYmjsbEqAEAnc0prA</recordid><startdate>20231124</startdate><enddate>20231124</enddate><creator>XIA YANG</creator><creator>PENG TIANFANG</creator><creator>HAN YINGZHOU</creator><creator>QIAO YUYANG</creator><scope>EVB</scope></search><sort><creationdate>20231124</creationdate><title>MEMS chip protection structure and MEMS device</title><author>XIA YANG ; PENG TIANFANG ; HAN YINGZHOU ; QIAO YUYANG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN117105164A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>XIA YANG</creatorcontrib><creatorcontrib>PENG TIANFANG</creatorcontrib><creatorcontrib>HAN YINGZHOU</creatorcontrib><creatorcontrib>QIAO YUYANG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>XIA YANG</au><au>PENG TIANFANG</au><au>HAN YINGZHOU</au><au>QIAO YUYANG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS chip protection structure and MEMS device</title><date>2023-11-24</date><risdate>2023</risdate><abstract>The invention provides an MEMS chip protection structure and an MEMS device, relates to the technical field of MEMS chip reliability, and aims to solve the problem of insufficient reliability of an MEMS chip in an impact vibration environment. The MEMS chip protection structure comprises an active limiting mechanism, the active limiting mechanism is arranged on the outer side of the side wall of an MEMS chip, and the active limiting mechanism is configured to clamp the MEMS chip when powered on. According to the MEMS chip protection structure provided by the invention, the effective protection on the MEMS chip can be realized.
本发明提供了一种MEMS芯片保护结构和MEMS器件，涉及MEMS芯片可靠性技术领域，以解决对MEMS芯片在冲击振动环境下可靠性不足的问题。MEMS芯片保护结构包括主动限位机构，所述主动限位机构设置于MEMS芯片侧壁外侧，所述主动限位机构配置为在通电时夹持所述MEMS芯片。本发明提供的MEMS芯片保护结构可以实现对MEMS芯片的有效保护。</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING |
| title | MEMS chip protection structure and MEMS device |
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