Clean room environment on-line monitoring system and method

The invention discloses a clean room environment online monitoring system and method, belongs to the field of environment monitoring, and relates to a data processing technology. Comprising an environment acquisition module, an acquisition analysis module, a server and a display module, adopts an au...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LONG CUNLIN, ZHANG HONGTAO, NIU WEN, WANG CHEN, ZHANG MINJUAN, CHEN YUERONG, SUN XIAONING, ZHANG XINYI, ZHAO ZHIJIE, LEI DI, UMIHIRA, REN JIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS CALCULATING COMPUTING COUNTING DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR TARIFF METERING APPARATUS TESTING
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