Wafer fixing table
The invention discloses a wafer fixing table, and the wafer fixing table comprises a pedestal which can move in the horizontal direction so as to carry a wafer; the adsorption disc base is mounted on the base; the adsorption disc is mounted above the adsorption disc base; the multiple adsorption adj...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a wafer fixing table, and the wafer fixing table comprises a pedestal which can move in the horizontal direction so as to carry a wafer; the adsorption disc base is mounted on the base; the adsorption disc is mounted above the adsorption disc base; the multiple adsorption adjusting blocks are installed on the adsorption disc base in the circumferential direction of the adsorption disc base and are stopped on the radial outer side of the adsorption disc, sliding rails extending in the radial direction of the adsorption disc are arranged at the positions, corresponding to the adsorption adjusting blocks, of the adsorption disc base, and the adsorption adjusting blocks slide along the sliding rails. And the linkage mechanism is connected to the multiple adsorption adjusting blocks, and the multiple adsorption adjusting blocks jointly move in the radial direction of the adsorption disc through the linkage mechanism. According to the wafer fixing table provided by the embodiment of the inve |
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