Cleaning device of epitaxial equipment, epitaxial equipment and self-cleaning method

The invention provides a cleaning device of epitaxial equipment, the epitaxial equipment and a self-cleaning method, the cleaning device comprises a breather pipe and a heating piece, the breather pipe is installed and connected between a gas inlet pipe and a tail gas pipe of the epitaxial equipment, and the gas inlet pipe and the breather pipe share the same gas source so that process gas can serve as cleaning gas to be introduced into the breather pipe; the heating piece is mounted on the tail gas pipe, and is used for heating sediments on the inner wall of the tail gas pipe, so that the sediments react with the clean gas, and the sediments are discharged out of the tail gas pipe under the washing of the clean gas. When the tail gas pipe is cleaned, clean gas is introduced into the gas inlet pipe, so that the clean gas flows into the tail gas pipe through the gas inlet pipe, meanwhile, sediments on the inner wall of the tail gas pipe are heated through the heating piece, and the sediments and the clean gas