Particle measurement device, three-dimensional shape measurement device, detection device, particle measurement system, and particle measurement method

The invention provides a particle measurement device, a three-dimensional shape measurement device, a detection device, a particle measurement system, and a particle measurement method capable of managing the amount of generated particles. The present invention is provided with: an acquisition unit (252) that acquires pad surface shape data indicating the surface shape of an electrode pad (P) including a probe trace touched by a probe (141); a detection unit (253) that detects, on the basis of the pad surface shape data, a pad reference surface (R) that is a reference for particle measurement; a concavo-convex calculation unit (254) that calculates, on the basis of the pad surface shape data, the volume (VMR) of a concave portion recessed from the pad reference surface (R) and the volume (VMP) of a convex portion protruding from the pad reference surface (R) in the surface shape of the electrode pad (P); and a particle generation amount calculation unit (255) that calculates a particle generation amount on th