LDI focusing system

The invention discloses an LDI focusing system, and relates to the technical field of direct writing exposure, and the LDI focusing system comprises an upper computer, a motion platform, and an alignment camera, an alignment lens cone, a light source and a distance measuring sensor which are arrange...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN HAIWEI, XU GUANGFENG, BIAN QINWEI, LI XIANJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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