Novel ESC ceramic disc integrated sintering method

The invention provides a novel integrated sintering method for an ESC ceramic plate, which comprises the step of sintering an electrode and a ceramic plate blank together under the protection of nitrogen, a reducing atmosphere and a water vapor condition to obtain the ceramic plate. Through the inte...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHU SHUNCUN, MA JUNFENG, ZHANG WEIQUAN, REN WEIKANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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