SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

The invention relates to a semiconductor memory device and a manufacturing method of the semiconductor memory device. A semiconductor memory device includes: a first gate stack structure including first interlayer insulating layers and first conductive layers alternately stacked in a vertical direct...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIN SANG-WAN, KIM SANG-SU, LEE KUN-YOUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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