Electrostatic chuck

The purpose of the present invention is to provide an electrostatic chuck capable of suppressing the influence of positional deviation of a refrigerant flow path. Provided is an electrostatic chuck provided with: a ceramic dielectric substrate; and a base plate that supports the ceramic dielectric s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IKEGUCHI MASAFUMI, UEFUJI JUMPEI, ONO EITO, UMETSU TOMOKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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