System and method for mass transfer

According to the system and method for mass transfer, the system with the double platforms and the multiple taking and placing units is utilized, when one set of substrates are subjected to mass transfer, the other set of substrates execute replacement and alignment of the substrates at the same tim...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CAI ZONGLIN, CHEN LYUMING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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