System and method for mass transfer
According to the system and method for mass transfer, the system with the double platforms and the multiple taking and placing units is utilized, when one set of substrates are subjected to mass transfer, the other set of substrates execute replacement and alignment of the substrates at the same tim...
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| creator | CAI ZONGLIN CHEN LYUMING |
| description | According to the system and method for mass transfer, the system with the double platforms and the multiple taking and placing units is utilized, when one set of substrates are subjected to mass transfer, the other set of substrates execute replacement and alignment of the substrates at the same time, mass transfer and feeding and discharging are conducted synchronously, and compared with a traditional mass transfer mode, the efficiency can be improved by 90% or above.
本发明提供一种巨量转移的系统及方法，利用双平台及多个取放单元的系统，当其中一组基板进行巨量转移时，另一组基板同时执行基板的更换及对位，让巨量转移与进出料同步运行，相较于传统巨量转移的方式能够提高90％以上的效率。 |
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本发明提供一种巨量转移的系统及方法，利用双平台及多个取放单元的系统，当其中一组基板进行巨量转移时，另一组基板同时执行基板的更换及对位，让巨量转移与进出料同步运行，相较于传统巨量转移的方式能够提高90％以上的效率。</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230929&DB=EPODOC&CC=CN&NR=116825904A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230929&DB=EPODOC&CC=CN&NR=116825904A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CAI ZONGLIN</creatorcontrib><creatorcontrib>CHEN LYUMING</creatorcontrib><title>System and method for mass transfer</title><description>According to the system and method for mass transfer, the system with the double platforms and the multiple taking and placing units is utilized, when one set of substrates are subjected to mass transfer, the other set of substrates execute replacement and alignment of the substrates at the same time, mass transfer and feeding and discharging are conducted synchronously, and compared with a traditional mass transfer mode, the efficiency can be improved by 90% or above.
本发明提供一种巨量转移的系统及方法，利用双平台及多个取放单元的系统，当其中一组基板进行巨量转移时，另一组基板同时执行基板的更换及对位，让巨量转移与进出料同步运行，相较于传统巨量转移的方式能够提高90％以上的效率。</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAOriwuSc1VSMxLUchNLcnIT1FIyy9SyE0sLlYoKUrMK05LLeJhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYnJqXmpJfHOfoaGZhZGppYGJo7GxKgBANDRJks</recordid><startdate>20230929</startdate><enddate>20230929</enddate><creator>CAI ZONGLIN</creator><creator>CHEN LYUMING</creator><scope>EVB</scope></search><sort><creationdate>20230929</creationdate><title>System and method for mass transfer</title><author>CAI ZONGLIN ; CHEN LYUMING</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN116825904A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>CAI ZONGLIN</creatorcontrib><creatorcontrib>CHEN LYUMING</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CAI ZONGLIN</au><au>CHEN LYUMING</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>System and method for mass transfer</title><date>2023-09-29</date><risdate>2023</risdate><abstract>According to the system and method for mass transfer, the system with the double platforms and the multiple taking and placing units is utilized, when one set of substrates are subjected to mass transfer, the other set of substrates execute replacement and alignment of the substrates at the same time, mass transfer and feeding and discharging are conducted synchronously, and compared with a traditional mass transfer mode, the efficiency can be improved by 90% or above.
本发明提供一种巨量转移的系统及方法，利用双平台及多个取放单元的系统，当其中一组基板进行巨量转移时，另一组基板同时执行基板的更换及对位，让巨量转移与进出料同步运行，相较于传统巨量转移的方式能够提高90％以上的效率。</abstract><oa>free_for_read</oa></addata></record> |
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| title | System and method for mass transfer |
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