Equipment for purifying third-generation semiconductor isostatic pressing graphite

The invention discloses third-generation semiconductor isostatic pressing graphite purification equipment, and particularly relates to the technical field of graphite purification equipment.The third-generation semiconductor isostatic pressing graphite purification equipment comprises a base used fo...

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Bibliographische Detailangaben
Hauptverfasser:	WANG MIN, REN LUKUI, LI CHENGWEN, WU YUPEI, LYU XIURONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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