Substrate conveyance apparatus and substrate conveyance method

The substrate transfer apparatus includes: a transfer unit that transfers a substrate from a loading end of a transfer path to a predetermined stop position; a substrate passing sensor which projects detection light to the substrate passing through a predetermined position closer to the carrying-in end side than the stop position of the carrying path, and detects the presence or absence of the substrate at the predetermined position on the basis of the passing amount or reflection amount of the detection light; a setting unit that, when the transport unit transports the substrate, sets a transport distance after the substrate is transported to the stop position at a time when the detection result of the substrate by the sensor changes from "no substrate" to "no substrate" via "substrate"; a monitoring unit that monitors whether the detection result has changed again to "substrate" before the substrate reaches the stop position; and a resetting unit that, when the detection result has changed again to "presenc