Coplanar capacitive sensor and defect detection method
The invention relates to a coplanar capacitive sensor and a defect detection method, belongs to the technical field of coplanar capacitive sensors, and solves the technical problem that the same coplanar capacitive sensor cannot detect defects of different depths in the prior art. The coplanar capac...
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| creator | ZHAO HONGFEI PAN ZHAO CHEN FANG TANG ZENGWU CHENG SHUANGSHUANG WEN YINTANG GUO BAOSU LIU YINGZHI AN DONGYANG LIU ZHAO ZHANG YUYAN |
| description | The invention relates to a coplanar capacitive sensor and a defect detection method, belongs to the technical field of coplanar capacitive sensors, and solves the technical problem that the same coplanar capacitive sensor cannot detect defects of different depths in the prior art. The coplanar capacitive sensor comprises two groups of electrode assemblies arranged on the same plane, wherein the two groups of electrode assemblies are oppositely arranged along a first direction; each electrode assembly comprises at least two electrode plates, the electrode plates of each electrode assembly are arranged at intervals in the second direction, the second direction is perpendicular to the first direction, and each electrode plate can be independently connected to serve as a receiving electrode or an exciting electrode. The coplanar capacitive sensor can detect defect information of different depths, the sensor does not need to be replaced, manual measurement errors can be reduced, the detection efficiency and accura |
| format | Patent |
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| title | Coplanar capacitive sensor and defect detection method |
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