Nanoimprint leveling equipment and method based on interferometer

The nanoimprint leveling device and method are used for leveling a first joint surface of a first fixing plate and a second joint surface of a second adjusting block, and comprise at least one interferometer, a first adjusting block, a second adjusting block and a second adjusting block, the interfe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHI XIAOHUA, TIAN XUWEI, LIU XIAOCHENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The nanoimprint leveling device and method are used for leveling a first joint surface of a first fixing plate and a second joint surface of a second adjusting block, and comprise at least one interferometer, a first adjusting block, a second adjusting block and a second adjusting block, the interferometer is used for detecting the real-time distance d between any point on the first joint surface of the first fixing plate and any point on the second joint surface of the second adjusting block; the translation assembly comprises a translation driving device in transmission connection with the interferometer and a translation bracket, the interferometer is mounted on the translation bracket, the translation driving device can drive the interferometer to translate in a first plane, and the first plane is parallel to the first joint surface or the second joint surface; the control device is electrically connected with the translation driving device and the interferometer, and the control device is used for contro