Method for manufacturing component and plasma processing apparatus

The embodiment of the invention provides a preparation method of a part and a plasma processing device, relates to the technical field of plasma processing, and is used for solving the problem of how to improve the durability of the part in the plasma processing device. A plasma processing apparatus...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIN JUN, HOU LEI, HE MINBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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