Fluid supply system

A fluid supply system includes a first fluid source configured to supply a first fluid, a second fluid source configured to supply a second fluid, a heat exchanger configured to exchange heat between the first fluid and the second fluid, a first fluid recovery tank configured to recover the first fluid that has passed through the heat exchanger; and a first delivery pipe configured to deliver the first fluid from the first fluid source to the first fluid recovery tank via the heat exchanger. The heat exchanger may be disposed at a vertical height higher than a vertical height of the first fluid recovery tank. 一种流体供应系统包括被构造为供应第一流体的第一流体源、被构造为供应第二流体的第二流体源、被构造为在所述第一流体与所述第二流体之间进行热交换的热交换器、被构造为回收已经通过所述热交换器的所述第一流体的第一流体回收罐以及被构造为将所述第一流体从所述第一流体源经由所述热交换器输送到所述第一流体回收罐的第一输送管。所述热交换器可以设置在比所述第一流体回收罐的竖直高度高的竖直高度处。