High-speed precision control device and method for multi-axis motion platform

High-speed precision control device and method for multi-axis motion platform

The invention discloses a high-speed precision control device and method for a multi-axis motion table, relates to the field of high-speed precision control of multi-axis motion tables, and aims to solve the problems that the control precision and speed of the multi-axis motion table of an existing...

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Hauptverfasser: CUI NING, TAN JIUBIN, LI LI, LIU YANG, DONG YUE, SONG FAZHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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creator CUI NING
TAN JIUBIN
LI LI
LIU YANG
DONG YUE
SONG FAZHI
description The invention discloses a high-speed precision control device and method for a multi-axis motion table, relates to the field of high-speed precision control of multi-axis motion tables, and aims to solve the problems that the control precision and speed of the multi-axis motion table of an existing photoetching machine are insufficient, and communication among different board cards interferes with one another. According to the high-speed precise control device and method for the multi-axis motion platform, data interaction and parameter setting are carried out through the Ethernet, command processing is carried out through the VME bus, data processing is carried out through the SRIO bus, and control command and data processing are separately operated, so that a control protocol is simple, and logic design is simplified; complex program design work caused by adopting a unified VME bus to process commands and data is effectively avoided. Compared with a traditional VME bus, the SRIO bus has the advantages that
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subjects CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
title High-speed precision control device and method for multi-axis motion platform
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