Method for protecting semiconductor test piece in material analysis process

The invention provides a method for protecting a semiconductor test piece in a material analysis process. The method comprises the following steps: S1, placing the semiconductor test piece on an operation platform; s2, delaminating the semiconductor test piece to a specific level needing to be analy...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIU JILUN, ZHANG SHIXIN, CHEN RONGQIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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