Supply control system for multiple tanks

A supply control system for cans used in a semiconductor manufacturing process is disclosed. A supply control system for cans according to an embodiment of the present disclosure includes a plurality of cans for storing a large amount of process materials for manufacturing semiconductors; a main sup...

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Bibliographische Detailangaben
Hauptverfasser: KANG TAE-WOOK, HUANG XIAOZHONG, KIM JI-HOON, CHOI YOUNG-SOO, PILZ THOMAS W, KABLER SAMUEL S, KWON HO-SAN, HUGHES CHRISTOPHER L, PREGO JAMES PAUL, LEE SANG-KEUN, SMITH ANDREW JOHN, YU FANGYUAN, ZHANG XINGYE, IN SANG-JAE, KIM YONG-TAE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A supply control system for cans used in a semiconductor manufacturing process is disclosed. A supply control system for cans according to an embodiment of the present disclosure includes a plurality of cans for storing a large amount of process materials for manufacturing semiconductors; a main supply pipe configured to communicate with the branch supply pipes respectively coupled to the plurality of tanks and to supply a process material to the semiconductor manufacturing apparatus; a plurality of flow control devices respectively included in the branch supply pipes and configured to control a flow rate of the process material discharged from each of the plurality of tanks; a sensor included in the main supply pipe and configured to measure a flow rate and a supply pressure of the process material supplied from each of the plurality of tanks to the semiconductor manufacturing apparatus in real time; a backup portion coupled to the main supply tube and configured to complementarily discharge the stored proce