Hole tilt angle measurement using FIB diagonal cut-outs

A method of evaluating a region of a sample comprising a plurality of apertures, wherein the method comprises: taking a first image of the region by scanning the region with a first charged particle beam; evaluating the first image to determine a first center-to-center distance between a first hole and a second hole of the plurality of holes; milling a diagonal cut at an angle in a region including the second hole within the region such that the upper surface of the milled sample where the second hole is located in the milling region is recessed relative to the upper surface of the sample where the first hole is located; subsequently, a second image of the region is captured by scanning the region using the first charged particle beam; evaluating the second image to determine a second center-to-center distance between a first hole and a second hole of the plurality of holes; and comparing the second center-to-center distance with the first center-to-center distance. 一种评估包括多个孔的样本区域的方法，其中该方法包括：通过使用第一带电粒子束扫描该区域来