Multi-step periodic grating structure and preparation method thereof

The invention discloses a multi-step periodic grating structure and a preparation method thereof, and relates to the technical field of micro-displacement detection. Comprising periodic multi-step grating structures, the multi-step grating structure of each period comprises a substrate and a four-st...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZU KAIXUAN, ZHAO RUI, SHI YUNBO, SHEN FUMING, ZHANG XU, LIU HAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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