Method for improving sensitivity of detecting metal ion pollution

The invention provides a method for improving the sensitivity of detecting metal ion pollution, which comprises the following steps of: firstly adopting an isotropic process treatment process with unbiased radio frequency and high pressure, then adopting an anisotropic process treatment process with...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XU HUAN, LYU YABING, CHEN LIJUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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