Silicon rod detection method and detection equipment

The embodiment of the invention provides a silicon rod detection method and detection equipment, and the method comprises the steps: collecting a plurality of data points on the peripheral contour of a silicon rod, and enabling the data points to be arranged at intervals in the circumferential direc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI HONG, ZHU LIANG, CAO ZHEN, ZHANG ZUNHAO, JING JIAN, DONG SHENG, WEI MENGTI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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