Titanium-based tubular alloy target material and preparation method thereof

Compared with a conventional powder loading tube target production process, the titanium-based tubular alloy target material and the preparation method have the advantages that powder is firstly subjected to compression molding, then subjected to cold isostatic pressing densification and finally subjected to hot isostatic pressing sintering, and the problems that Ti-based powder is large in shrinkage, prone to bending and difficult to machine after hot isostatic pressing are solved. The relative density of the finally obtained titanium-based tubular alloy target material is larger than or equal to 99%, the grain size is uniform, and the average grain size is 30-200 microns. 本发明公开了一种钛基管状合金靶材及其制备方法，与常规装粉生产管靶工艺相比，本发明通过先对粉体模压成型，然后冷等静压致密化，最后热等静压烧结，解决了Ti基粉末热等静压后收缩大、易弯曲、难加工的问题。最终所得的钛基管状合金靶材相对密度≥99％，晶粒尺寸均匀，平均晶粒尺寸30～200μm。