1-130GHz ultra-wideband directional coupler based on micro-coaxial technology

The invention discloses a 1-130GHz ultra-wideband directional coupler based on a micro coaxial process. The directional coupler comprises a GSG probe port and a micro coaxial coupling line, the GSG probe port comprises an input port, a coupling port, an isolation port and a straight-through port, the micro-coaxial coupling line comprises an outer conductor, an inner conductor and a periodic medium supporting and loading structure, the periodic medium supporting and loading structure is an SU8 formed by periodically punching an organic material with a photosensitive property, the outer conductor is provided with a periodic process window, and the outer conductor is provided with a dielectric layer; the input port, the coupling port, the isolation port and the straight-through port are all of coaxial line structures, the micro coaxial coupling line performs mode conversion through Y-shaped junction separation coupling lines at the two ends to realize coupling line-coaxial transition, impedance matching is reali