Gas sensor suitable for high-humidity environment detection and preparation process thereof

The invention discloses a gas sensor suitable for high-humidity environment detection and a preparation process thereof, and belongs to the technical field of sensors. The gas sensor comprises a silicon substrate layer and a silicon dioxide structure layer, wherein the silicon dioxide structure layer is arranged above the silicon substrate layer; the silicon dioxide structure layer comprises PAD areas arranged at the two ends and a gas sensor area arranged in the center; the gas sensor area comprises a heating resistor, a sensing electrode, a via metal column and a gas sensitive material, two sides of the gas sensor area are fixed, and the whole gas sensor area is suspended above the cavity; the via metal columns are densely distributed above the sensing electrode, so that the gas sensor has a super-hydrophobic characteristic. By designing the metal layer and the metal via pattern, a large number of via metal columns are distributed above the sensing electrode, so that the super-hydrophobic gas sensor has the