Semiconductor device

A semiconductor device includes: a substrate having a cell array region, a peripheral circuit region, and a connection region; a device separation region including a first device separation layer defining a cell active region on the cell array region, a second device separation layer defining a peripheral active region on the peripheral circuit region, and a third device separation layer defining an active dam on the connection region; a gate structure including a gate electrode crossing the cell active region on the cell array region, extending into the third device separation layer on the connection region, and having an end surface in the third device separation layer; and a gate contact plug electrically connected to the gate electrode on the connection region, in which the third device separation layer includes a first insulating pad, a second insulating pad on the first insulating pad, and an embedded insulating layer. 一种半导体器件包括：衬底，其具有单元阵列区、外围电路区和连接区；器件分离区，其包括在单元阵列区上限定单元有源区的第一器件分离层、在外围电路区上限定外围有源区的第二器件分离