Electrostatic accelerometer capable of automatically optimizing and adjusting performance state
The invention discloses an electrostatic accelerometer capable of automatically optimizing and adjusting a performance state, and the accelerometer comprises a sensitive probe which is used for obtaining a displacement offset signal of an inspection mass block relative to a capacitor plate frame; th...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an electrostatic accelerometer capable of automatically optimizing and adjusting a performance state, and the accelerometer comprises a sensitive probe which is used for obtaining a displacement offset signal of an inspection mass block relative to a capacitor plate frame; the displacement sensing circuit is used for converting the capacitance difference signal into a voltage signal; the feedback control circuit is used for calculating feedback voltage according to the voltage signal; the bias voltage control circuit is used for calculating the bias voltage of the next period according to the current bias voltage and the current feedback voltage, performing digital-to-analog conversion on the bias voltage, applying the converted bias voltage to the sensitive probe, and adjusting the static stiffness and the measuring range of the accelerometer; and the electrostatic execution circuit is used for applying feedback voltage to the polar plates in the surrounding polar plate frame, so that |
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