Method and system for acquiring sensing depth of coplanar capacitive sensor

The invention relates to a method and a system for acquiring the sensing depth of a coplanar capacitive sensor, belongs to the field of nondestructive testing, and solves the problem that the acquired sensing depth cannot effectively measure and reflect the effective detection distance of the coplan...

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Bibliographische Detailangaben
Hauptverfasser: PAN ZHAO, TANG ZENGWU, WEN YINTANG, AN DONGYANG, LI RUIHANG, ZHANG YUYAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a method and a system for acquiring the sensing depth of a coplanar capacitive sensor, belongs to the field of nondestructive testing, and solves the problem that the acquired sensing depth cannot effectively measure and reflect the effective detection distance of the coplanar capacitive sensor due to incomplete consideration or inconsistent results in the acquisition method in the prior art. The method comprises the following steps: determining the sensing depth of a target sensor according to the change of sensitivity data of a measurement domain of the target sensor in the depth direction; wherein the depth direction is a direction far away from and perpendicular to the surface of the target sensor. The sensing depth results obtained through the method are consistent, and the effects of effectively measuring the effective detection distance of the target sensor and accurately reflecting the performance of the target sensor are achieved. 本发明涉及一种同面电容传感器的传感深度的获取方法及获取系统,属于无损检测领域,解决了现有技