Crystalline silicon cell photo-thermal annealing equipment
The invention discloses crystal silicon cell photo-thermal annealing equipment, and relates to the technical field of photovoltaic cell production equipment. The equipment comprises a cabinet, one side of the cabinet is provided with a material port used for feeding and taking out wafers, an anneali...
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| creator | HU CHAO ZHI SHAOPENG MA CHUANBING ZHAO JIANAN MIN XIANGBO |
| description | The invention discloses crystal silicon cell photo-thermal annealing equipment, and relates to the technical field of photovoltaic cell production equipment. The equipment comprises a cabinet, one side of the cabinet is provided with a material port used for feeding and taking out wafers, an annealing channel is arranged in the cabinet, a halogen tungsten lamp tube, lasers and an oscillation piece are arranged in the annealing channel, and the oscillation piece is arranged on the inner side wall of the annealing channel, connected with the lasers and used for driving the lasers to oscillate in a reciprocating mode. The randomness of laser irradiation on the surface of the wafer is improved; the positions of the lamp tube and the light radiation device can be changed during annealing, so that the irradiation angles of the lamp tube and the light radiation device on the crystalline silicon film are changed, the irradiation randomness is improved, light generated by the lamp tube and the light radiation device c |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Crystalline silicon cell photo-thermal annealing equipment |
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