Semiconductor element and manufacturing method thereof

A semiconductor device includes a substrate, an active region on the substrate, a recessed region in the active region, a gate dielectric layer on the recessed region, and a gate dielectric layer on the gate dielectric layer. Wherein an edge portion of the gate dielectric layer has a rounded profile...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIONG CHANGBO, YANG QINGZHONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!