Grating ruler measuring system based on linear array CCD

The invention provides a grating ruler measuring system based on a linear array CCD (Charge Coupled Device). The device is characterized by comprising a light-intensity-adjustable light emitting diode, a lens, a reflector, a scale grating, an indication grating, a linear array CCD reading head, a signal pre-processing module, an FPGA signal control module and an upper computer. Light intensity signals are collected through the linear array CCD, stable and accurate signals can be obtained, and four sections are cut out from the signals to be processed to obtain displacement. The method can be used for displacement measurement with micron-order precision, and belongs to the technical field of grating ruler measurement. 本发明提供的是一种基于线阵CCD的光栅尺测量系统。其特征是：它由可调节光强的发光二极管、透镜、反射镜、标尺光栅、指示光栅、线阵CCD读数头、信号前处理模块、FPGA信号控制模块、上位机组成。本发明通过线阵CCD采集光强信号，能够获得较为稳定准确的信号，从信号上截取4段进行处理，得到位移。本发明可以于微米级精度的位移测量，属于光栅尺测量技术领域。