Silicon rod defect automatic detection system and detection method

The invention discloses a silicon rod defect automatic detection system and detection method. The system comprises a silicon rod rotating module, a boundary dimension detection module, an internal defect detection module, a detection mechanism movement module, a rack module and a control module, the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI HONG, ZHU LIANG, CAO ZHEN, ZHANG ZUNHAO, JING JIAN, DONG SHENG, WEI MENGTI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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