Silicon rod defect automatic detection system and detection method
The invention discloses a silicon rod defect automatic detection system and detection method. The system comprises a silicon rod rotating module, a boundary dimension detection module, an internal defect detection module, a detection mechanism movement module, a rack module and a control module, the...
Gespeichert in:
Hauptverfasser: | , , , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention discloses a silicon rod defect automatic detection system and detection method. The system comprises a silicon rod rotating module, a boundary dimension detection module, an internal defect detection module, a detection mechanism movement module, a rack module and a control module, the silicon rod rotating module is used for rotating a to-be-detected silicon rod and assisting appearance detection, and the internal defect detection module determines the positions of four crystal wires of the silicon rod; the boundary dimension detection module is used for identifying the crystal line position of the silicon rod and measuring the diameter and length of the silicon rod; the internal defect detection module comprises a linear array camera and an infrared light source and can identify internal defects such as subfissure, dislocation and twin crystal of the silicon rod; and the detection mechanism movement module can realize continuous and synchronous movement of the boundary dimension detection modul |
---|