Lens support, objective lens and lens surface shape compensation method
The invention provides a lens support, an objective lens and a lens surface shape compensation method. The lens support comprises a lens frame, a supporting device and a plurality of surface shape compensation devices. The mirror frame comprises an annular body and a first annular platform. The supp...
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| creator | WANG YANFEI YANG RUOJI LI YUNFENG |
| description | The invention provides a lens support, an objective lens and a lens surface shape compensation method. The lens support comprises a lens frame, a supporting device and a plurality of surface shape compensation devices. The mirror frame comprises an annular body and a first annular platform. The supporting device is located on the first annular platform so as to support the lens. The multiple surface shape compensation devices are located on the side face, away from the lens, of the annular body and distributed in the circumferential direction of the annular body so that it can be guaranteed that the surface shape of each area of the lens can be adjusted. The surface shape compensation device comprises a flexible lever and a driving part; the driving part is used for actively providing compensation acting force, and the flexible lever is used for transmitting the compensation acting force to the supporting device to compensate the surface shape of the lens. And through the detection result of the interferomete |
| format | Patent |
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The lens support comprises a lens frame, a supporting device and a plurality of surface shape compensation devices. The mirror frame comprises an annular body and a first annular platform. The supporting device is located on the first annular platform so as to support the lens. The multiple surface shape compensation devices are located on the side face, away from the lens, of the annular body and distributed in the circumferential direction of the annular body so that it can be guaranteed that the surface shape of each area of the lens can be adjusted. The surface shape compensation device comprises a flexible lever and a driving part; the driving part is used for actively providing compensation acting force, and the flexible lever is used for transmitting the compensation acting force to the supporting device to compensate the surface shape of the lens. 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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | Lens support, objective lens and lens surface shape compensation method |
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