Method for preparing scanning capacitance microscope test piece

The invention discloses a method for preparing a scanning capacitance microscope test piece, which comprises the following steps of: providing a sample which internally comprises at least one target object to be analyzed; gradually grinding from the edge of the sample to a target area containing the target object to be analyzed in a manual grinding manner, and stopping grinding at a position d1 away from a longitudinal section passing through the structure center of the at least one target object to be analyzed in the target area to form a grinding stop point surface; cutting the grinding stop point surface by using a plasma type focused ion beam matched with a scanning electron microscope, advancing from the grinding stop point surface to the target area, and stopping cutting at a position d2 away from the longitudinal cross section to form a cutting stop point surface (0 lt); d2lt; d2lt; d1; and polishing the cutting stop point surface in a manual grinding manner, and gradually removing the part of the samp