Method and device for optimizing electron cell granularity of embryonic electron cell array

The embodiment of the invention provides an embryonic electron cell array electron cell granularity optimization method and device, and the method comprises the steps: obtaining electron cell granularity parameters, and building an embryonic electron cell array reliability analysis model and an intr...

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Bibliographische Detailangaben
Hauptverfasser: MENG YAFENG, LIANG GUANHUI, WANG TAO, LV GUIZHOU, HAN CHUNHUI, AN TING, ZHU SAI, LI ZEXI
Format: Patent
Sprache:chi ; eng
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