Extreme ultraviolet light source device

The extreme ultraviolet light source device is provided with: a light source unit that generates plasma that emits extreme ultraviolet light; a vacuum chamber disposed between a utilization device that utilizes the extreme ultraviolet light and the light source unit; a fragment trap which is dispose...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YABUTA YASUNOBU, ASHIZAWA, NORITAKA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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