Target for optical measurement of grooves

A metrology target is designed to measure a feature at the bottom of a trench in a device under test, such as a tungsten recess vertical profile in a word line in a three-dimensional (3D) NAND. The metrology target follows a design rule of the device under test and includes a stack of stacks having...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ANTONELLI, GEORGE, A, KELLER NICHOLAS JOSEPH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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