Mechanism and method for transferring workpieces carriers between distributing box and receiving container

本发明公开了一种可在分配盒(130)和SMIF容器(116)之间传送工件暗盒(123)的传送机构。该传送机构包括一个支架(102)，支架(102)具有在其第一侧上用于支撑SMIF容器的一个第一支撑平台(114)，和在其第二侧上用于支撑分配盒的一个第二支撑平台(128)。支架还包括一个载运器传送装置机构(112)，当在初始位置时，载运器传送装置机构完全位于支架中。传送装置机构包括一个臂(134)及枢转地安装到臂上的一个抓手(136)。一旦将SMIF容器和分配盒设置到它们各自的支撑平台上，传送装置机构就在这两个容器之间传送暗盒。 A wafer transport mechanism is disclosed capable of transferring workpiece cassettes between lot boxes and SMIF pods. The transport mechanism includes a frame having a first support platform on a first side of the frame for supporting a SMIF pod, and a second support platform on a second side of the frame for supporting a lot box. The frame further includes a carrier transfer mechanism which resides completely within the frame when in a home position. The transfer mechanism includes an arm and a gripper pivotally mounted to the arm. Once a SMIF pod and lot box are seated on their respective support platforms, the transfer mechanism transfers a cassette between the two containers.